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Cluster nucleation

Watching nanoclusters nucleate

A transmission electron microscope capable of identifying individual atoms or defects in a crystal lattice has much to offer materials scientists. It has now been used to study the early stages of nanocluster nucleation and growth in semiconductors.

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Figure 1: Monte Carlo simulation of the implantation of Si ions (1014 ions cm−2, 5 keV energy) into a Si wafer.


  1. Eaglesham, D.J., Stolk, P.A., Gossmann, H.-J. & Poate, J.M. Appl. Phys. Lett. 65, 2305–2307 (1994).

    CAS  Article  Google Scholar 

  2. Voyles, P.M., Muller, D.A., Grazul, J.L., Citrin, P.H. & Gossmann, H.-J.L. Nature 416, 826–829 (2002).

    CAS  Article  Google Scholar 

  3. Kaiser, U., Muller, D.A., Grazul, J.L., Chuvilin, A. & Kawasaki, M. Nature Mater. 2, 102–105 (2002).

    Article  Google Scholar 

  4. Cowern, N. & Rafferty, C. Mater. Res. Bull. 25, 39–44 (2000).

    CAS  Article  Google Scholar 

  5. Theiss, S.K. et al. Thin Solid Films 365, 219–230 (2000).

    CAS  Article  Google Scholar 

  6. Law, M.E., Gilmer, G.H. & Jaraiz, M. Mater. Res. Bull. 25, 45–50 (2000).

    CAS  Article  Google Scholar 

  7. Sadigh, B. et al. Appl. Phys. Lett. 80, 4738–4740 (2002).

    CAS  Article  Google Scholar 

  8. Pelaz, L. et al. Appl. Phys. Lett. 75, 662–664 (1999).

    CAS  Article  Google Scholar 

  9. Lenosky, T.J., Sadigh, B., Theiss, S.K., Caturla, M.-J. & Diaz de la Rubia, T. Appl. Phys. Lett. 77, 1834–1836 (2000).

    CAS  Article  Google Scholar 

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de la Rubia, T., Gilmer, G. Watching nanoclusters nucleate. Nature Mater 1, 89–90 (2002).

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